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Updated: Apr 15, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Compensating thermal drift of hybrid silicon and lithium niobate ring resonances
Abstract:
We present low-power compensation of thermal drift of resonance wavelengths in hybrid silicon and lithium niobate ring resonators based on the linear electro-optic effect. Fabricated devices demonstrate a resonance wavelength tunability of 12.5 pm/V and a tuning range of 1 nm. A capacitive geometry and low thermal sensitivity result in the compensation of 17°C of temperature variation using tuning powers at sub-nanowatt levels. The method establishes a route for stabilizing high-quality factor resonators in chip-scale integrated photonics subject to temperature variations.
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