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A compact time-of-flight mass spectrometer for ion source characterization.

L Chen1, X Wan1, D Z Jin1

  • 1Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang, Sichuan 621900, China.

The Review of Scientific Instruments
|April 3, 2015
PubMed
Summary
This summary is machine-generated.

A new compact time-of-flight mass spectrometer was developed for ion source characterization. This device offers high mass resolution and a wide detection range, proving valuable for plasma research.

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Area of Science:

  • Physics
  • Analytical Chemistry
  • Plasma Science

Background:

  • Ion source characterization is crucial for understanding various plasma applications.
  • Existing mass spectrometers may lack the necessary compactness or resolution for certain diagnostic tasks.

Purpose of the Study:

  • To develop and present a compact time-of-flight mass spectrometer for ion source characterization.
  • To evaluate the performance metrics, including mass resolution and ion energy detection range.

Main Methods:

  • Design and construction of a compact time-of-flight mass spectrometer utilizing orthogonal injection and angle reflection.
  • Optimization of mass resolution to approximately 1690 (FWHM).
  • Testing the ion energy detection range from approximately 3 to 163 eV using an electron impact ion source.

Main Results:

  • Achieved a mass resolution of approximately 1690 (FWHM).
  • Demonstrated an ion energy detection range of 3–163 eV.
  • The developed spectrometer has compact dimensions (413 × 250 × 414 mm).

Conclusions:

  • The developed compact time-of-flight mass spectrometer is a valuable diagnostic tool.
  • Its high mass resolution and compact design facilitate fundamental research on ion spectra.
  • Enables the study of plasma mass-to-charge composition across a wide parameter range.