Nanoparticle containing channel waveguides produced by a multi-energy masked ion-implantation process

We present the fabrication and characterization of channel waveguides based on composites containing silver nanoparticles. The substrate employed is silica and the nanoparticles were produced by a masked ion-implantation technique. Multiple implantation processes were made at different energies in order to produce waveguides with an appropriate width. We also present results for the characterization of the waveguiding properties of the devices produced.