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La/B(4)C multilayer mirrors with an additional wavelength suppression.

Philipp Naujok, Sergiy Yulin, Anna Bianco

    Optics Express
    |April 4, 2015
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    Summary
    This summary is machine-generated.

    New multilayer mirrors using La/B(4)C achieve high reflectivity at 6.7 nm and suppression at 20.1 nm. This dual-functionality is crucial for advanced scientific instruments like the EIS-TIMER at FERMI Free Electron Laser.

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    Area of Science:

    • Materials Science
    • Optics
    • X-ray Physics

    Background:

    • Development of advanced optical coatings for specific wavelength performance.
    • Need for dual-functionality mirrors in advanced light source applications.
    • Challenges in achieving simultaneous high reflectivity and suppression at different wavelengths.

    Purpose of the Study:

    • To design and fabricate La/B(4)C multilayer mirrors for specific optical performance.
    • To achieve maximum reflectivity at 6.7 nm and reflectivity suppression at 20.1 nm.
    • To validate mirror performance for the EIS-TIMER at the FERMI Free Electron Laser.

    Main Methods:

    • Deposition of La/B(4)C multilayer structures.
    • Characterization using grazing incidence X-ray reflectometry (Cu-Kα radiation).
    • Optical property evaluation using EUV reflectometry (6.5 - 21.0 nm spectral region).
    • Application of an anti-reflective coating for 20.1 nm suppression.

    Main Results:

    • Simultaneous achievement of 53.4% reflectivity at 6.72 nm and 0.15% reflectivity at 20.1 nm.
    • Minimization of reflectivity loss at 6.7 nm to 1.0% due to the anti-reflective coating.
    • Successful characterization of multilayer structure and optical properties.

    Conclusions:

    • La/B(4)C multilayer mirrors with dual-wavelength functionality have been successfully fabricated and characterized.
    • The developed mirrors meet the stringent optical requirements for the EIS-TIMER instrument.
    • The anti-reflective coating strategy effectively suppresses unwanted wavelengths with minimal impact on desired reflectivity.