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Strong ionization asymmetry in a geometrically symmetric radio frequency capacitively coupled plasma induced by

Bastien Bruneau1, Timo Gans2, Deborah O'Connell2

  • 1LPICM-CNRS, Ecole Polytechnique, route de Saclay, 91120 Palaiseau, France.

Physical Review Letters
|April 11, 2015
PubMed

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