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Revealing an intermediate region between the collisional radiofrequency plasma bulk and its sheath
J Beckers1, D J M Trienekens1, G M W Kroesen1
1Department of Applied Physics, Eindhoven University of Technology, P.O. box 513, 5600 MB, Eindhoven, the Netherlands.
Abstract:
Experimental evidence of the existence of an intermediate region between a capacitively coupled plasma and the collisional space-charge region at its borders is presented. This proof is generated by monitoring-in an airplane carrying out parabolic flights-the trajectory of plasma-confined microparticles. Based on only primary data and without the need for a sophisticated model, our analysis concludes a sharply marked transition from the sheath region into another region with a significantly lower-yet nonzero-space-charge density, i.e., a region which is often called the presheath.
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