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Updated: Apr 14, 2026

3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
Published on: April 29, 2020
M Holzweber1, A G Shard2, H Jungnickel3
1BAM - Federal Institute for Material Science and Testing, Division of Surface Analysis and Interfacial Chemistry Unter den Eichen 44-46, 12205, Berlin, Germany.
Argon cluster sputtering using time-of-flight secondary ion mass spectrometry (TOF-SIMS) was used to analyze organic multilayer materials for organic light-emitting diodes. The study found that argon cluster size had a negligible effect on sputter yield and depth resolution.
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