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Updated: Apr 13, 2026

Atomic Force Microscopy Cantilever-Based Nanoindentation: Mechanical Property Measurements at the Nanoscale in Air and Fluid
Published on: December 2, 2022
Influence of roughness and tilt on nanoindentation measurements: A quantitative model
Mathilde Laurent-Brocq1, Estelle Béjanin1, Yannick Champion1
1Institut de Chimie et des Matériaux de Paris Est, UMR 7182, CNRS-Université Paris-Est, 2-8 rue Henri Dunant, 94320, Thiais, France.
Abstract:
A model, which takes into account the indentation size effect, was proposed to relate hardness and its standard deviation to the quality of the sample surface, i.e., the roughness and the tilt. Stainless steel samples were mechanically polished so as to obtain various roughness and tilt. Then the quality of the surface and the hardness were measured respectively by scanning probe microscopy and by nanoindentation. The model was fitted according to those experimental data. It was shown that the standard deviation only depends on the ratio of the arithmetic roughness over the contact depth of the indent while the average hardness also depends on the contact depth and on the tilt. It was deduced that hardness measurements are performed with an uncertainty lower than 10% if: (i) the ratio of the arithmetic roughness over the contact depth of the indent is lower than 0.05, (ii) the tilt of the sample is lower than 2° and (iii) the difference of roughness between samples is lower than 50%.

