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A beam-membrane structure micromachined differential pressure flow sensor.

P Chen¹, Y L Zhao¹, B Tian¹

¹State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China.

The Review of Scientific Instruments

|May 3, 2015

Summary

This summary is machine-generated.

This study presents a novel micromachined flow sensor using a beam-membrane structure. It accurately measures mass flow based on differential pressure, demonstrating ideal performance in practical applications.

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Area of Science:

Mechanical Engineering
Fluid Dynamics
Microfabrication

Background:

Traditional flow sensors face challenges in accuracy and cost.
Differential pressure sensors offer a viable alternative for mass flow measurement.
Fluid-structure interaction (FSI) is crucial for understanding sensor performance.

Purpose of the Study:

To design and investigate a novel beam-membrane structure micromachined flow sensor.
To analyze the fluid-structure interaction (FSI) characteristics of the sensor.
To fabricate and calibrate the sensor for practical applications.

Main Methods:

Numerical analysis and analog simulation were employed to study FSI.
The sensor's working mechanism was analyzed based on FSI results.
Fabrication and calibration were performed to validate sensor performance.

Main Results:

The beam-membrane structure effectively utilizes differential pressure for flow sensing.
FSI analysis provided insights into the sensor's working principle.
Calibration confirmed the sensor's ideal static characteristics.

Conclusions:

The developed beam-membrane structure micromachined flow sensor is effective for mass flow measurement.
The sensor exhibits excellent performance and suitability for practical applications.
This design offers a promising solution for advanced flow sensing technology.