Molecular layer deposition of organic-inorganic hybrid films using diethylzinc and trihydroxybenzene

We fabricated organic-inorganic hybrid thin films by using molecular layer deposition with diethylzinc and benzenetriol at temperatures of 100-160 °C. In this MLD process, the surface reactions were found to be self-terminating and complementary enough to make a uniform, conformal, high-quality hybrid thin film. The prepared zinc oxide-crosslinked hydroxybenzene and zinc oxide nanolaminated films (ZnOHB/ZnO) exhibited good stability and field effect mobility (> 0.6 cm2/V · s). The MLD method is an ideal technique for fabrication of various organic-inorganic hybrid thin films.