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Updated: Apr 13, 2026

Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium
Published on: December 16, 2011
Writing nanopatterns with electrochemical oxidation on redox responsive organometallic multilayers by AFM
Jing Song1, Mark A Hempenius, Hong Jing Chung
1Institute of Materials Research and Engineering, A*STAR (Agency for Science, Technology and Research), Research Link 3, 117602, Singapore. songj@imre.a-star.edu.sg.
Abstract:
Nanoelectrochemical patterning of redox responsive organometallic poly(ferrocenylsilane) (PFS) multilayers is demonstrated by electrochemical dip pen lithography (EDPN). Local electrochemical oxidation and Joule heating of PFS multilayers from the tip are considered as relevant mechanisms related to structure generation. The influence of applied bias potential, tip velocity, and multilayer thickness on the pattern height and width were investigated.

