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Optimal ADF STEM imaging parameters for tilt-robust image quantification.

K E MacArthur1, A J D'Alfonso2, D Ozkaya3

  • 1Department of Materials, University of Oxford, Parks Road OX1 3PH, UK.

Ultramicroscopy
|May 11, 2015
PubMed
Summary
This summary is machine-generated.

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Optimizing detector collection and probe angles enhances analytical electron microscopy accuracy. This approach improves robustness to sample tilting, crucial for precise atomic-scale measurements.

Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Physics

Background:

  • Accurate quantification in Analytical Scanning Transmission Electron Microscopy (ADF STEM) is vital for materials characterization.
  • Sample tilting can introduce significant errors in ADF STEM quantification due to channeling effects and reduced cross-sections.
  • Existing methods may lack robustness against minor sample misalignments.

Purpose of the Study:

  • To propose an optimized experimental design for ADF STEM.
  • To enhance the accuracy and robustness of ADF STEM quantification, particularly for tilted samples.
  • To mitigate quantification errors arising from sample tilting.

Main Methods:

  • Investigating the impact of detector collection angles and probe convergence angles on quantification accuracy.
Keywords:
Electron channellingQuantitative ADFSample tilt

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  • Analyzing the relationship between sample tilt, channeling, and scattering contributions.
  • Developing an optimization strategy for experimental parameters.

    • Main Results:

    • Optimizing detector collection and probe convergence angles significantly improves robustness to small sample tilts.
    • Accounting for the decrease in cross-section due to reduced channeling in tilted samples is essential for accurate quantification.
    • A smaller detector collection angle can leverage increased elastic scattering to compensate for decreased TDS signals in tilted samples.

    Conclusions:

    • The proposed experimental design approach enhances ADF STEM quantification accuracy.
    • Optimized detector and probe angles provide greater reliability when analyzing slightly tilted samples.
    • This work offers a pathway to more precise elemental analysis using ADF STEM.