Three-dimensional profilometry of microlenses by phase shifting interferometery using nematic liquid crystal material...

In this paper, we report the use of a nematic liquid crystal material filled cell in transmission mode as a voltage controlled phase modulator for the characterization of microlenses. In one arm of the Mach-Zehnder interferometer, a nematic liquid crystal filled cell with DC voltage connection was placed, and in another arm of the interferometer microlenses with a 4-F imaging system were placed. Interference takes place between the light beams coming from the two arms of the Mach-Zehnder interferometer, one after passing through the nematic liquid crystal cell and another after passing through microlenses. Interference patterns were recorded by a CCD camera. By applying DC voltage to the nematic liquid crystal filled cell, various phase shifted interferograms were recorded, and from phase shifted interferograms, the shape and size of microlenses were determined. The results of the reconstructed profile of the microlenses are compared with white-light profilometry.