Integrating optical fabrication and metrology into the optical design process

Area of Science:

• Optical Engineering
• Image Quality Analysis
• Surface Scatter Theory

Background:

• Classical image formation theory primarily considers diffraction and geometrical aberrations.
• Surface scatter due to optical fabrication errors significantly impacts image quality.
• A systems engineering approach is needed to comprehensively analyze image degradation.

Purpose of the Study:

• To validate a generalized linear systems formulation of surface scatter theory.
• To develop a systems engineering analysis of image quality incorporating scatter effects.
• To integrate optical metrology and fabrication into the optical design process.

Main Methods:

• Validated a generalized linear systems formulation for surface scatter.
• Characterized surface scatter behavior using a surface transfer function.
• Incorporated band-limited surface roughness into the scatter theory.
• Implemented a fast Fourier transform algorithm for scatter calculation.

Main Results:

• The generalized surface scatter theory provides a robust framework for analysis.
• Surface scatter behavior is characterized by a surface transfer function.
• Mathematical rigor was achieved by incorporating surface roughness.
• Practical calculation of scatter from surfaces with wide dynamic range is feasible.

Conclusions:

• Advances in surface scatter theory and computational power enable routine derivation of optical fabrication tolerances.
• Image quality analysis can now comprehensively include diffraction, aberrations, and scatter effects.
• Optical metrology and fabrication can be integrated into the early stages of optical design.