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Electrothermally actuated tip-tilt-piston micromirror with integrated varifocal capability
Optics Express
|May 14, 2015
Summary
This study presents a novel Micro-Electro-Mechanical Systems (MEMS) micromirror capable of large tilt angles, tunable focus, and piston motion. This single, low-cost device integrates four degrees of freedom for advanced optical applications.
Area of Science:
- Optics and Photonics
- Materials Science
- Mechanical Engineering
Background:
- Micro-Electro-Mechanical Systems (MEMS) micromirrors are crucial optical components.
- Current MEMS devices typically handle beam steering or focusing separately, with limited tilt angles (<10 degrees).
Purpose of the Study:
- To develop a single, low-cost MEMS device integrating multiple functionalities: tip/tilt, piston mode, and varifocal capability.
- To achieve significantly larger tilt angles than previously reported.
Main Methods:
- A 400-micron diameter mirror was designed and fabricated.
- Thermal bimorph actuators were employed to drive the mirror.
- The device's tip/tilt, focal length, and piston range were characterized.
Main Results:
- Demonstrated deflection angles of ±40 degrees along both axes.
- Achieved a tunable focal length ranging from -0.48 mm to +20.5 mm.
- Obtained a piston mode range of 300 microns, offering four controllable degrees of freedom.
Conclusions:
- A single MEMS device successfully integrates tip/tilt, varifocal, and piston functionalities.
- The device offers large deflection angles and multiple degrees of freedom, surpassing limitations of existing technologies.
- Potential applications include smart lighting, optical switches, and telecommunication systems.
