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    Area of Science:

    • Metrology
    • Optical Engineering
    • Surface Science

    Background:

    • Confocal surface metrology is widely used for microstructure surface topography measurement.
    • Optical aberrations in microscope lenses introduce systematic errors in these measurements.
    • Existing methods do not fully account for the variability of these errors across different microstructures.

    Purpose of the Study:

    • To investigate the impact of local slope angle on optical aberration-induced errors in confocal surface metrology.
    • To quantify the deviations between measured and actual surface topography caused by these errors.
    • To provide a basis for correcting optical aberrations and enhancing measurement accuracy.

    Main Methods:

    • Development of a full vectorial high numerical aperture (NA) numerical model.
    • Simulation of intensity depth response changes with varying slope angles.
    • Experimental validation of theoretical predictions.

    Main Results:

    • Optical aberration errors are not constant and depend on the local slope angle of the microstructure.
    • Altered slope angles shift the intensity peak by up to several hundred nanometers.
    • Theoretical findings are supported by comparative experimental data.

    Conclusions:

    • Local slope angle significantly influences optical aberration errors in confocal surface metrology.
    • Accurate surface topography measurement requires accounting for slope-dependent aberrations.
    • The study enables correction of optical aberrations, improving profilometric measurement accuracy.