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Updated: Apr 12, 2026

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

Published on: February 27, 2013

Characterization of surface acoustic waves by stroboscopic white-light interferometry.

Kimmo Kokkonen, Lauri Lipiäinen, Igor Shavrin

|May 14, 2015

Summary

We developed a stroboscopic white-light interferometer for precise surface acoustic wave measurements. This technique achieves sub-100 picometer resolution, revealing detailed vibration patterns in microstructures.

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Last Updated: Apr 12, 2026

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

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Published on: February 27, 2013

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Area of Science:

Acoustics
Optics
Materials Science
Nanotechnology

Background:

Surface acoustic waves (SAWs) are crucial for microelectronic devices.
Accurate measurement of SAW amplitude and phase is essential for device characterization and optimization.
Existing methods may lack the resolution or phase sensitivity required for detailed analysis of complex SAW fields.

Purpose of the Study:

To present a novel phase-sensitive method for absolute amplitude measurements of surface acoustic wave fields.
To demonstrate the capability of characterizing out-of-plane surface vibration fields with high amplitude resolution.
To analyze the focusing of SAWs in microstructures using the developed technique.

Main Methods:

Utilized a stroboscopic white-light interferometer with a supercontinuum light source.
Employed short light pulses (<300 ps) for high-frequency detection.
Leveraged high-resolution interferometric phase data for precise amplitude analysis.

Main Results:

Achieved better than 100 picometer (pm) amplitude resolution for out-of-plane surface vibrations.
Successfully measured SAW focusing by an annular interdigital transducer at 74 MHz.
Recorded a maximum vibration amplitude of 3 nanometers (nm) in the microstructures.

Conclusions:

The developed stroboscopic white-light interferometry technique offers unprecedented precision for SAW measurements.
This method enables detailed characterization of vibration fields in microelectronic devices.
The findings facilitate the design and optimization of SAW-based devices through accurate amplitude and phase analysis.