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Characterization of surface acoustic waves by stroboscopic white-light interferometry.

Kimmo Kokkonen, Lauri Lipiäinen, Igor Shavrin

    Optics Express
    |May 14, 2015
    PubMed
    Summary

    We developed a stroboscopic white-light interferometer for precise surface acoustic wave measurements. This technique achieves sub-100 picometer resolution, revealing detailed vibration patterns in microstructures.

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    Area of Science:

    • Acoustics
    • Optics
    • Materials Science
    • Nanotechnology

    Background:

    • Surface acoustic waves (SAWs) are crucial for microelectronic devices.
    • Accurate measurement of SAW amplitude and phase is essential for device characterization and optimization.
    • Existing methods may lack the resolution or phase sensitivity required for detailed analysis of complex SAW fields.

    Purpose of the Study:

    • To present a novel phase-sensitive method for absolute amplitude measurements of surface acoustic wave fields.
    • To demonstrate the capability of characterizing out-of-plane surface vibration fields with high amplitude resolution.
    • To analyze the focusing of SAWs in microstructures using the developed technique.

    Main Methods:

    • Utilized a stroboscopic white-light interferometer with a supercontinuum light source.
    • Employed short light pulses (<300 ps) for high-frequency detection.
    • Leveraged high-resolution interferometric phase data for precise amplitude analysis.

    Main Results:

    • Achieved better than 100 picometer (pm) amplitude resolution for out-of-plane surface vibrations.
    • Successfully measured SAW focusing by an annular interdigital transducer at 74 MHz.
    • Recorded a maximum vibration amplitude of 3 nanometers (nm) in the microstructures.

    Conclusions:

    • The developed stroboscopic white-light interferometry technique offers unprecedented precision for SAW measurements.
    • This method enables detailed characterization of vibration fields in microelectronic devices.
    • The findings facilitate the design and optimization of SAW-based devices through accurate amplitude and phase analysis.