Multispectral interference filter arrays with compensation of angular dependence or extended spectral range

Thin film Fabry-Perot filter arrays with high selectivity can be realized with a single patterning step, generating a spatial modulation of the effective refractive index in the optical cavity. In this paper, we investigate the ability of this technology to address two applications in the field of image sensors. First, the spectral tuning may be used to compensate the blue-shift of the filters in oblique incidence, provided the filter array is located in an image plane of an optical system with higher field of view than aperture angle. The technique is analyzed for various types of filters and experimental evidence is shown with copper-dielectric infrared filters. Then, we propose a design of a multispectral filter array with an extended spectral range spanning the visible and near-infrared range, using a single set of materials and realizable on a single substrate.