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    This study demonstrates thin film Fabry-Perot filter arrays for advanced image sensors. The technology enables spectral tuning to correct blue-shift and designs multispectral filters for visible to near-infrared imaging.

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    Area of Science:

    • Optics and Photonics
    • Materials Science
    • Image Sensor Technology

    Background:

    • Fabry-Perot filter arrays offer high spectral selectivity.
    • Spatial modulation of refractive index in optical cavities is achievable.
    • Existing filter technologies face challenges with spectral shift and limited spectral range.

    Purpose of the Study:

    • To investigate thin film Fabry-Perot filter arrays for image sensor applications.
    • To demonstrate spectral tuning for compensating blue-shift in oblique incidence.
    • To propose a novel multispectral filter array design for extended spectral coverage.

    Main Methods:

    • Fabrication of thin film Fabry-Perot filter arrays using a single patterning step.
    • Analysis of spectral tuning for oblique incidence compensation.
    • Design and simulation of a multispectral filter array using a single set of materials.

    Main Results:

    • Demonstrated spectral tuning capability to correct blue-shift in filters.
    • Experimental validation using copper-dielectric infrared filters.
    • Proposed a design for a multispectral filter array covering visible and near-infrared ranges.

    Conclusions:

    • Thin film Fabry-Perot filter arrays are a viable technology for advanced image sensors.
    • The technology allows for spectral tuning to overcome incidence-related spectral shifts.
    • A single-substrate, single-material multispectral filter array design is feasible for broad spectral applications.