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Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization
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Orientation contrast of secondary electron images from electropolished metals

D Chen1, C P Chang1, M H Loretto2

  • 1Research Center for Physical Properties and Microstructure of Metals, Department of Materials and Optoelectronic Science, National Sun Yat-Sen University, Kaohsiung 80424, Taiwan, ROC.

Ultramicroscopy
|May 19, 2015
PubMed

Keywords:
ElectropolishingMetalsOrientation contrastSEM

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