Updated: Apr 12, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
S Mukherjee1, U Givan2, S Senz2
1†Department of Engineering Physics, Polytechnique Montréal, C. P. 6079, Succ. Centre-Ville, Montréal, Québec H3C 3A7, Canada.
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