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Updated: Apr 12, 2026

Energy Dispersive X-ray Tomography for 3D Elemental Mapping of Individual Nanoparticles
Published on: July 5, 2016
Energy dispersive X-ray analysis on an absolute scale in scanning transmission electron microscopy
Z Chen1, A J D'Alfonso2, M Weyland3
1School of Physics and Astronomy, Monash University, Clayton, Victoria 3800, Australia.
Abstract:
We demonstrate absolute scale agreement between the number of X-ray counts in energy dispersive X-ray spectroscopy using an atomic-scale coherent electron probe and first-principles simulations. Scan-averaged spectra were collected across a range of thicknesses with precisely determined and controlled microscope parameters. Ionization cross-sections were calculated using the quantum excitation of phonons model, incorporating dynamical (multiple) electron scattering, which is seen to be important even for very thin specimens.
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