Complex Materials by Atomic Layer Deposition
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Published on: January 22, 2019
Adam M Schwartzberg1, Deirdre Olynick1
1The Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA, 94720, USA.
Abstract:
Complex materials are defined as nanostructured materials with combinations of structure and/or composition that lead to performance surpassing the sum of their individual components. There are many methods that can create complex materials; however, atomic layer deposition (ALD) is uniquely suited to control composition and structural parameters at the atomic level. The use of ALD for creating complex insulators, semiconductors, and conductors is discussed, along with its use in novel structural applications.
