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Updated: Apr 11, 2026

Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography
Published on: February 12, 2017
Kai Chen1,2, Bharath Bangalore Rajeeva3, Zilong Wu3
1†National Institute for Materials Science, International Center for Material Nanoarchitectonics (MANA), Tsukuba, 305-0044, Japan.
We developed moiré nanosphere lithography (M-NSL) by stacking nanosphere layers to create moiré patterns. This technique fabricates complex nanostructures and gold nanostructures with unique optical properties.
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