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Sub-nanometer periodic nonlinearity error in absolute distance interferometers.

Hongxing Yang1, Kaiqi Huang1, Pengcheng Hu1

  • 1Institute of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, People's Republic of China.

The Review of Scientific Instruments
|June 1, 2015
PubMed
Summary
This summary is machine-generated.

A novel interferometer design eliminates periodic nonlinearity errors in nanometer-scale measurements. This advancement significantly improves absolute distance measurement accuracy by preventing beam mixing and leakage.

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Area of Science:

  • Metrology
  • Optical Engineering
  • Physics

Background:

  • Periodic nonlinearity is a significant challenge in achieving high accuracy for absolute distance measurements at the nanometer scale.
  • Existing interferometry methods are susceptible to errors caused by frequency and/or polarization mixing and beam leakage.

Purpose of the Study:

  • To develop and demonstrate a new integrated interferometer capable of eliminating periodic nonlinearity errors.
  • To enhance the accuracy of absolute distance measurements by addressing the limitations of conventional interferometers.

Main Methods:

  • Development of an integrated interferometer utilizing a non-polarizing beam splitter.
  • Spatial separation of reference and measuring beams using a retro-reflector and an angle prism.
  • Elimination of frequency and/or polarization mixing and beam leakage through the new design.

Main Results:

  • The developed interferometer effectively eliminates periodic nonlinearity errors.
  • The strict requirement for laser source polarization is significantly reduced.
  • Experimental results show periodic phase error maintained within 0.0018°.

Conclusions:

  • The novel integrated interferometer successfully overcomes the limitations of periodic nonlinearity in absolute distance measurements.
  • The design offers a robust solution for high-accuracy metrology applications.
  • This approach paves the way for more precise nanometer-scale measurements.