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Updated: Apr 11, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Wei-Lun Hsu1, Pin Chieh Wu1, Jia-Wern Chen1
1Department of Physics, National Taiwan University, Taipei 10617, Taiwan.
Researchers developed 3D nanostructures for metasurfaces, enabling precise light manipulation. This advancement allows for anomalous beam steering and higher density integration compared to traditional 2D designs.
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