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Updated: Apr 11, 2026

Aerosol-assisted Chemical Vapor Deposition of Metal Oxide Structures: Zinc Oxide Rods
Published on: September 14, 2017
Single ZnO nanocactus gas sensor formed by etching of ZnO nanorod
Sung Ryong Ryu1, S D Gopal Ram, Hak-Dong Cho
1Quantum-functional Semiconductor Research Center, Dongguk University, Seoul 100-715, Korea.
Abstract:
Etching of materials on the nanoscale is a challenging but necessary process in nanomaterials science. Gas sensing using a single ZnO nanocactus (NC), which was prepared by facile isotropic nanoetching of zinc oxide nanorods (NR) grown by chemical vapor deposition (CVD) using an organic photoresist (PR) by a thermochemical reaction, is reported in this work. PR consists of carboxylic acid groups (COOH) and cyclopentanone (C5H8O), which can react with zinc and oxygen atoms, respectively, on the surface of a ZnO NR. The thermochemical reaction is controllable by varying the concentration of PR and reaction time. A gas sensor was fabricated using a single NC. Gas sensing was tested using different gases such as CH4, NH3 and carbon monoxide (CO). It was estimated that the surface area of a ZnO NC in the case of 50% PR was found to increase four-fold. When compared with a single ZnO NR gas sensor, the sensitivity of a ZnO NC was found to increase four-fold. This increase in sensitivity is attributed to the increase in surface area of the ZnO NC. The formed single ZnO NC gas sensor has good stability, response and recovery time.
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