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Electrothermally-Actuated Micromirrors with Bimorph Actuators--Bending-Type and Torsion-Type
Cheng-Hua Tsai1, Chun-Wei Tsai1, Hsu-Tang Chang2
1Graduate Institute of Photonics and Optoelectronics and the Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan. d98941019@ntu.edu.tw.
Abstract:
Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed. The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. (Durham, NC, USA). A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors. Electrothermal actuation has achieved a large angular movement in the micromirrors. Application of an external electric current 0.04 A to the bending-type, restricted-torsion-type, and free-torsion-type mirrors achieved rotation angles of 1.69°, 3.28°, and 3.64°, respectively.
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