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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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Silicon-based on-chip electrically tunable sidewall Bragg grating Fabry-Perot filter.

Weifeng Zhang, Nasrin Ehteshami, Weilin Liu

    Optics Letters
    |July 1, 2015
    PubMed
    Summary

    We developed an electrically tunable silicon filter with a narrow spectral notch and high Q-factor. This tunable optical filter demonstrates potential for high-speed data modulation applications.

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    Area of Science:

    • Photonics
    • Optical Engineering
    • Materials Science

    Background:

    • Integrated photonic devices are crucial for advanced optical communication systems.
    • Electrically tunable filters offer dynamic spectral control for wavelength-agile applications.
    • Fabry-Perot filters provide high-resolution spectral selectivity.

    Purpose of the Study:

    • To design, fabricate, and test a novel silicon-based on-chip electrically tunable sidewall Bragg grating Fabry-Perot filter.
    • To characterize the filter's spectral performance, including notch width, Q-factor, and extinction ratio.
    • To evaluate the filter's electro-optic tuning characteristics and modulation bandwidth for data transmission.

    Main Methods:

    • Fabrication of a silicon-based on-chip filter utilizing sidewall Bragg gratings.
    • Spectral measurements to determine filter characteristics (notch width, Q-factor, extinction ratio).
    • DC bias measurements for electro-optic wavelength tuning rate evaluation.
    • Electro-optic frequency response analysis to determine modulation bandwidth.
    • Testing the filter's performance in modulating a 3.5 Gb/s pseudorandom binary sequence.

    Main Results:

    • The filter exhibits a narrow reflection notch of ~46 pm and a high Q-factor of 33,500.
    • An extinction ratio of 16.4 dB was achieved.
    • Electro-optic tuning rates of -1.15 nm/V (forward bias) and 4.2 pm/V (reverse bias) were measured.
    • A 3-dB modulation bandwidth of approximately 5.6 GHz was demonstrated due to strong light confinement.

    Conclusions:

    • The developed silicon-based tunable filter offers excellent spectral resolution and high Q-factor.
    • The device exhibits efficient electro-optic tuning and a significant modulation bandwidth.
    • This tunable optical filter shows promise for high-speed optical signal processing and communication systems.