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3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
Published on: April 29, 2020
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High sensitivity and high resolution element 3D analysis by a combined SIMS-SPM instrument
1Advanced Instrumentation for Ion Nano-Analytics (AINA), MRT Department, Luxembourg Institute of Science and Technology (LIST), 41 rue du Brill, L-4422 Belvaux, Luxembourg.
Beilstein Journal of Nanotechnology
|July 15, 2015
Summary
This study combines secondary ion mass spectrometry (SIMS) and scanning probe microscopy (SPM) to create accurate 3D chemical maps. The novel SIMS-SPM prototype effectively corrects artifacts caused by sample variations and surface topography.
Area of Science:
- Materials Science
- Analytical Chemistry
- Surface Science
Background:
- Accurate 3D chemical mapping is crucial for material characterization.
- Traditional methods often suffer from artifacts due to sample heterogeneity and topography.
- Secondary Ion Mass Spectrometry (SIMS) and Scanning Probe Microscopy (SPM) offer complementary surface analysis capabilities.
Purpose of the Study:
- To develop and validate a combined SIMS-SPM prototype for enhanced 3D chemical analysis.
- To demonstrate the capability of the integrated system in overcoming common analytical challenges.
- To provide accurate chemical 3D maps for diverse material systems.
Main Methods:
- Integration of a SIMS instrument with an SPM module.
- Analysis of five distinct test structures: polymer blend, super-alloy, cermet, reticle, and nanoclusters in a polymer matrix.
- Acquisition and correlation of secondary ion mass spectrometry data with topographical data.
Main Results:
- Successful generation of accurate 3D chemical maps for complex materials.
- Identification and mitigation of artifacts arising from sputter rate variations.
- Correction of artifacts caused by secondary ion extraction inefficiencies due to topographical features.
- Measurement of relative sputter rates for PS/PVP and TiCN cermet phases.
Conclusions:
- The combined SIMS-SPM approach significantly improves the accuracy of 3D chemical mapping.
- This integrated technique is effective in addressing artifacts related to material inhomogeneity and surface topography.
- The prototype offers a powerful tool for advanced materials characterization and analysis.
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