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Surface excitations in the modelling of electron transport for electron-beam-induced deposition experiments

Francesc Salvat-Pujol1, Roser Valentí1, Wolfgang S Werner2

  • 1Institut für Theoretische Physik, Goethe-Universität Frankfurt, Max-von-Laue-Straße 1, 60438 Frankfurt am Main, Germany.

Beilstein Journal of Nanotechnology
|July 15, 2015
PubMed

Keywords:
Monte Carlo simulation of electron transportfocused-electron-beam-induced deposition (FEBID)secondary-electron emissionsurface excitations

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