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Related Experiment Video

Updated: Apr 6, 2026

Measurement of Quantum Interference in a Silicon Ring Resonator Photon Source
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Phase coherence length in silicon photonic platform.

Yisu Yang, Yangjin Ma, Hang Guan

    Optics Express
    |July 21, 2015
    PubMed
    Summary

    We measured phase coherence lengths in silicon waveguides, finding 4.17 mm for strip and 1.61 mm for rib types. This provides a key metric for silicon photonics fabrication and design.

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    Highly uniform thermally undercut silicon photonic devices in a 300 mm CMOS foundry process.

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    Area of Science:

    • Photonics and Optical Engineering
    • Materials Science and Engineering
    • Semiconductor Device Fabrication

    Background:

    • Silicon photonics is crucial for integrated optical circuits.
    • Fabrication uniformity is a key challenge in silicon photonics.
    • Phase coherence length is an important parameter for device performance.

    Purpose of the Study:

    • To report for the first time two typical phase coherence lengths in highly confined silicon waveguides.
    • To present a new experimental method for quantifying phase coherence length.
    • To establish phase coherence length as a critical parameter for guiding silicon photonics design and fabrication.

    Main Methods:

    • Fabrication of silicon waveguides using a standard CMOS foundry (220nm silicon-on-insulator, 248nm lithography).

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    Last Updated: Apr 6, 2026

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  • Measurement of random phase fluctuations across 800 on-chip silicon Mach-Zehnder interferometers.
  • Statistical analysis to extract phase coherence lengths for different waveguide types.

    • Main Results:

    • Extracted phase coherence lengths of 4.17 ± 0.42 mm for single-mode strip waveguides.
    • Extracted phase coherence lengths of 1.61 ± 0.12 mm for rib waveguides.
    • Experimental verification of a new theoretical model for phase coherence length quantification.

    Conclusions:

    • Phase coherence length is a significant parameter influenced by fabrication non-uniformity.
    • The reported coherence lengths provide valuable data for silicon photonics design.
    • The developed experimental method offers a reliable way to assess phase coherence in silicon waveguides.