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Topographic control of open-access microcavities at the nanometer scale
Optics Express
|July 21, 2015
Summary
We developed a novel fabrication method for open-access optical microcavities, achieving nanometer-scale control and high reproducibility. This advancement enables precise engineering of microcavity properties for light-matter studies.
Area of Science:
- Optics and Photonics
- Materials Science
- Nanotechnology
Background:
- Open-access optical microcavities offer unique advantages for light-matter interactions due to tunability and confined electric fields.
- Existing fabrication methods often lack precise control over microcavity topography and reproducibility.
Purpose of the Study:
- To present recent advancements in the fabrication of open-access optical microcavities.
- To demonstrate nanometer-scale topographic control and high reproducibility in microcavity fabrication.
- To enable the engineering of photonic potential for specific applications.
Main Methods:
- Fabrication of open-access optical microcavities with topographic control of micromirrors.
- Consideration of template shape and dielectric mirror growth effects during fabrication.
- Optical characterization of fabricated microcavities.
Main Results:
- Achieved nanometer-scale topographic control of micromirrors.
- Demonstrated a high degree of reproducibility in microcavity fabrication.
- Characterized microcavities with effective radii of curvature down to 4.3 µm and mode volumes of 16×(λ/2)(3).
Conclusions:
- The developed fabrication method offers precise control over microcavity properties.
- This work facilitates the engineering of photonic potential for diverse light-matter studies.
- Advancements pave the way for tailored optical microcavity designs.

