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Full-field parallel interferometry coherence probe microscope for high-speed optical metrology.

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    This study presents a high-speed optical coherence probe tomography system for detailed semiconductor chip analysis. It achieves high resolution and speed, enabling precise microbump height uniformity measurements.

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    Area of Science:

    • Optical Physics
    • Metrology
    • Semiconductor Manufacturing

    Background:

    • Optical coherence probe tomography (OCTP) is crucial for non-destructive testing.
    • Existing OCTP systems often face limitations in speed and resolution for microscale metrology.
    • Polarization interferometry offers potential for enhanced OCTP performance.

    Purpose of the Study:

    • To develop a high-speed, high-resolution OCTP system for semiconductor metrology.
    • To demonstrate the system's capability in measuring microbump height uniformity.
    • To leverage polarization interferometry for improved imaging performance.

    Main Methods:

    • Utilized parallel detection of achromatic phase-shifted images.
    • Implemented a polarization interferometry-based OCTP system.
    • Employed a Linnik microscope setup for demonstration.

    Main Results:

    • Achieved high enface imaging speed (50 frames per second).
    • Obtained high lateral resolution and a short coherence gate.
    • Successfully determined microbump height uniformity in integrated semiconductor chips.

    Conclusions:

    • The developed OCTP system offers significant advancements in speed and resolution.
    • This technique is effective for precise microbump metrology in semiconductor applications.
    • The system's adaptability to various polarization-based interference microscopy setups is highlighted.