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Updated: Apr 6, 2026

Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating
Published on: October 11, 2016
Extended asymmetric-cut multilayer X-ray gratings
Researchers developed a large-area blazed grating for soft X-rays using a novel multilayer structure. This technique overcomes previous size limitations, enabling high-efficiency X-ray diffraction with a single diffracted order.
Area of Science:
- Optics and Photonics
- Materials Science
- X-ray Optics
Background:
- Traditional blazed gratings face limitations in size and efficiency for soft X-ray applications.
- Fabricating large-area gratings with high line densities is crucial for advanced X-ray optics.
Purpose of the Study:
- To report the fabrication and characterization of a large-area high-dispersion blazed grating for soft X-rays.
- To demonstrate a novel method for creating efficient blazed gratings using asymmetric-cut multilayer structures.
Main Methods:
- Fabrication of an asymmetric-cut multilayer structure on a coarse blazed grating substrate.
- Polishing the multilayer flat to reveal uniformly spaced layers, overcoming substrate step height limitations.
- Characterization of the grating's dispersion and efficiency using soft X-rays at 13.2 nm wavelength.
Main Results:
- Successful fabrication of a 27,060 line pairs/mm blazed grating with a 36.95 nm period.
- Demonstrated high efficiency and single diffracted order behavior due to dynamical diffraction in the multilayer.
- Overcame size limitations of previous methods by utilizing a patterned substrate.
Conclusions:
- The developed technique enables the production of large-area, high-dispersion blazed gratings for soft X-rays.
- The asymmetric-cut multilayer approach offers high efficiency and relaxes fabrication constraints.
- This advancement is significant for soft X-ray spectroscopy and imaging applications.
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