Segregation of materials in double precursor electron-beam-induced-deposition: a route to functional magnetic...

Here we report an observation of the phenomenon of spatial segregation of two materials in double precursor electron beam induced deposition. Segregation occurs under proper deposition conditions in a single spot illumination due to generic variation of electron current density within an electron beam. Combining precursors for magnetic (dicobaltoctacarbonyl) and non-magnetic (tetraethyl orthosilicate) properties we demonstrate a one-step fabrication process for magnetic tubules at the scale of 100 nm. Electron holography applied on the cross-section of thus prepared tubules reveals the concentration of the magnetic field in the cobalt rich shell, corroborating spatially distributed functionality. We elaborate the numerical model describing the observed phenomenon and defining the conditions for its practical achievement.