Development of a high-speed impedance measurement system for dual-frequency capacitive-coupled pulsed-plasma
Hohyoung Lee1, Jeongbeom Lee1, Gijung Park1
1Department of Physics, Natural Science Building, KAIST, 291 Daehak-ro, Yuseong-gu, Daejeon 305-701, South Korea.
Abstract:
A high-speed impedance measurement system was developed, which enables the measurement of various characteristics of CW and pulsed plasmas with time resolution of less than a microsecond. For this system, a voltage and current sensor is implemented in a printed circuit board to sense the radio frequency signals. A digital board, which has a high-speed analog to digital converter and a field-programmable gate-array, is used to calculate the impedance of the signal. The final output of impedance is measured and stored with a maximum speed of 3 Msps. This sensor system was tested in a pulsed-plasma by applying it to the point between the matching box and the plasma chamber. The experimental equipment was constructed connecting the matching box, a 13.56 MHz generator, a 2 MHz generator that produced pulsed power, and a pulse-signal generator. From the temporal behavior of the measured impedance, we were able to determine the time intervals of transient states, especially of the initial active state. This information can be used to set the pulse frequency and duty for plasma processing.
Related Concept Videos
Inductively Coupled Plasma Atomic Emission Spectroscopy: Instrumentation
There are three main types of inductively coupled plasma atomic emission spectroscopy (ICP-AES) instruments: sequential, simultaneous multichannel, and Fourier transform instruments, with the latter being less commonly used....
Inductively Coupled Plasma–Mass Spectrometry (ICP–MS): Overview
Inductively Coupled Plasma Atomic Emission Spectroscopy: Principle
The ions and electrons produced interact with the fluctuating magnetic field created by a water-cooled...
Dielectric Polarization in a Capacitor
Equivalent Capacitance
The following strategies are adopted to calculate...
Equivalent Capacitance


