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Updated: Apr 4, 2026

Atomically Traceable Nanostructure Fabrication
Published on: July 17, 2015
Jeffrey Camacho-Bunquin1, Heng Shou1, Payoli Aich1
1Chemical Sciences and Engineering Division, Argonne National Laboratory, Lemont, Illinois 60439, USA.
A novel integrated atomic layer deposition synthesis-catalysis (I-ALD-CAT) tool enables rapid creation and testing of catalytic materials. This system accelerates catalyst development by combining synthesis and reactivity evaluation in one platform.
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