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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
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Nonlinear tuning of microresonators for dynamic range enhancement
M Saghafi1, H Dankowicz1, W Lacarbonara2
1Department of Mechanical Science and Engineering , University of Illinois , Urbana, IL 61801, USA.
Proceedings. Mathematical, Physical, and Engineering Sciences
|September 8, 2015
Summary
This study introduces a new framework for nonlinear tuning of nano/microresonators. It models multilayer microbeams, revealing frequency shifts and hardening effects, crucial for dynamic range optimization.
Area of Science:
- Solid Mechanics
- Nanotechnology
- Micro-electromechanical Systems (MEMS)
Background:
- Nonlinear behavior in resonators is critical for advanced sensing and signal processing applications.
- Accurate modeling of microbeam dynamics, including nonlinearities and rotary inertia, is essential for device design.
- Understanding the transition to nonlinear response is key to optimizing the dynamic range of nano/microresonators.
Purpose of the Study:
- To develop and implement a novel framework for the nonlinear tuning of nano/microresonators.
- To establish a nonlinear model for multilayer microbeams incorporating transverse and longitudinal dynamics and rotary inertia.
- To investigate the critical amplitude for the onset of nonlinear characteristics and explore factors influencing the dynamic range.
Main Methods:
- Geometrically exact mechanical formulations for deriving nonlinear equations of motion.
- Galerkin method for discretization of partial differential equations after reformulation into a mixed form.
- Method of multiple scales for higher-order perturbation analysis and confirmation of results.
- Path-following techniques to analyze system parameter and geometric dependencies.
Main Results:
- A nonlinear model accurately capturing the dynamics of multilayer microbeams, including rotary inertia effects.
- Observation of a zeroth-order frequency shift and a hardening effect in the frequency response.
- Identification of the critical amplitude for the transition to nonlinear response characteristics.
- Exploration of the dependence of dynamic range on system parameters and bilayer microbeam geometry.
Conclusions:
- The developed framework provides a robust method for nonlinear tuning of nano/microresonators.
- The findings highlight the significance of nonlinear effects and provide insights into optimizing the dynamic range.
- The study offers a pathway for precise control and prediction of nonlinear behavior in micro/nanoscale devices.
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