Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: impact of reducing agents

A Delabie1, M Caymax, B Groven

  • 1Imec, Kapeldreef 75, B-3001 Leuven, Belgium. Annelies.Delabie@imec.be.

Chemical Communications (Cambridge, England)
|September 15, 2015
PubMed