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Scanning Electron Microscopy01:07

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A scanning electron microscope (SEM) is used to study the surface features of a sample by using an electron beam that scans the sample surface in a two-dimensional manner. Typically, areas between ~1 centimeter to 5 micrometers in width can be imaged. SEM can be used to image bacteria, viruses, tissues as well as larger samples like insects. Conventional SEM gives a magnification ranging from 20X to 30,000X and spatial resolution of 50 to 100 nanometers.
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Related Experiment Video

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Characterization of Ultra-fine Grained and Nanocrystalline Materials Using Transmission Kikuchi Diffraction
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Distinguishing cubic and hexagonal phases within InGaN/GaN microstructures using electron energy loss spectroscopy.

I J Griffiths1, D Cherns1, S Albert2

  • 1School of Physics, H. H. Wills Physics Laboratory, University of Bristol, Bristol, BS8 1TL, United Kingdom.

Journal of Microscopy
|September 15, 2015
PubMed
Summary
This summary is machine-generated.

Electron Energy Loss Spectroscopy reveals distinct N K-edge fine structures in cubic and hexagonal gallium nitride (GaN). This allows for precise mapping of crystal phases in 3D InGaN/GaN microstructures, crucial for understanding device properties.

Keywords:
EELSInGaN micro-structuresSTEMlight emitting diodes

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Area of Science:

  • Materials Science
  • Solid State Physics
  • Nanotechnology

Background:

  • 3D Indium Gallium Nitride/Gallium Nitride (InGaN/GaN) microstructures are vital for optoelectronic devices.
  • Metal Organic Vapor Phase Epitaxy (MOVPE) and Molecular Beam Epitaxy (MBE) are key growth techniques.
  • Crystal phase variations, particularly cubic inclusions in hexagonal wurtzite GaN, impact device performance.

Purpose of the Study:

  • To investigate the crystal phase differences in 3D InGaN/GaN microstructures.
  • To develop a method for mapping cubic and hexagonal GaN regions.
  • To understand how crystal phase affects electronic properties of light-emitting devices.

Main Methods:

  • Utilized a range of electron microscopy techniques.
  • Employed Electron Energy Loss Spectroscopy (EELS) to analyze material.
  • Focused on variations in the fine structure of the Nitrogen K-edge (N K-edge).

Main Results:

  • Observed clear differences in the N K-edge fine structure between cubic and hexagonal GaN.
  • Successfully mapped cubic and hexagonal regions within a GaN/InGaN microcolumnar device.
  • Demonstrated the capability of EELS for phase differentiation.

Conclusions:

  • EELS is an effective technique for distinguishing and mapping cubic and hexagonal GaN phases.
  • Understanding and mapping these phases is essential for optimizing InGaN/GaN devices.
  • Spatial resolution limitations of the mapping method were discussed.