Distinguishing cubic and hexagonal phases within InGaN/GaN microstructures using electron energy loss spectroscopy

I J Griffiths1, D Cherns1, S Albert2

  • 1School of Physics, H. H. Wills Physics Laboratory, University of Bristol, Bristol, BS8 1TL, United Kingdom.

Journal of Microscopy
|September 15, 2015
PubMed
Summary

Electron Energy Loss Spectroscopy reveals distinct N K-edge fine structures in cubic and hexagonal gallium nitride (GaN). This allows for precise mapping of crystal phases in 3D InGaN/GaN microstructures, crucial for understanding device properties.