Design of ultrafast laser-driven microactuator based on photoacoustic mechanism

In this work, an ultrafast laser-driven microactuator based on the photoacoustic mechanism was proposed with large amplitude and high response frequency. The microactuator was fabricated by LIGA technology. The displacement of the microactuator could be up to 11 μm at resonance state when the repeat frequency was around 14 kHz using a nanosecond pulse laser. Theoretical model was set up and the calculated results agree reasonably well with the experimental data. The microactuator based on the photoacoustic mechanism provides a more efficient actuation method.