Multi-physics simulation and fabrication of a compact 128 × 128 micro-electro-mechanical system Fabry-Perot cavity...

This paper demonstrates the design and fabrication of a 128×128 micro-electro-mechanical systems Fabry-Perot (F-P) cavity filter array, which can be applied for the hyperspectral imager. To obtain better mechanical performance of the filters, F-P cavity supporting structures are analyzed by multi-physics finite element modeling. The simulation results indicate that Z-arm is the key component of the structure. The F-P cavity array with Z-arm structures was also fabricated. The experimental results show excellent parallelism of the bridge deck, which agree with the simulation results. A conclusion is drawn that Z-arm supporting structures are important to hyperspectral imaging system, which can achieve a large tuning range and high fill factor compared to straight arm structures. The filter arrays have the potential to replace the traditional dispersive element.