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High-Q lithium niobate microdisk resonators on a chip for efficient electro-optic modulation.

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    Researchers developed high-quality lithium niobate (LN) microdisk resonators using standard semiconductor processes. These resonators achieve double the previous quality factor, enabling efficient electro-optic modulation.

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    Area of Science:

    • Materials Science
    • Photonics
    • Electrical Engineering

    Background:

    • Lithium niobate (LN) is a key material for integrated photonics due to its strong electro-optic effect.
    • Previous fabrication methods for LN microdisk resonators were complex and limited scalability.
    • Achieving high quality factors is crucial for efficient optical modulation and sensing applications.

    Purpose of the Study:

    • To fabricate high-quality lithium niobate microdisk resonators using conventional semiconductor fabrication processes.
    • To demonstrate the enhanced performance of these resonators compared to previous methods.
    • To showcase the potential for efficient electro-optic modulation in the fabricated devices.

    Main Methods:

    • Fabrication of lithium niobate microdisk resonators on a lithium niobate-silica-lithium niobate chip.
    • Utilized standard semiconductor manufacturing techniques for fabrication.
    • Characterization of the resonator's quality factor and electro-optic modulation performance.

    Main Results:

    • Achieved a quality factor of up to 1.19 × 10^6 for a 39.6-μm radius, 0.5-μm thick LN resonator.
    • This quality factor is double the previously recorded value for batch-producible LN resonators.
    • Demonstrated electro-optic modulation with an effective resonance-frequency tuning rate of 3.0 GHz/V.

    Conclusions:

    • Conventional semiconductor fabrication processes are effective for producing high-quality lithium niobate microdisk resonators.
    • The achieved quality factor significantly surpasses previous records, paving the way for advanced photonic devices.
    • The demonstrated electro-optic modulation performance highlights the potential for practical applications in optical communication and signal processing.