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Absolute thickness metrology with submicrometer accuracy using a low-coherence distance measuring interferometer.

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    A new system precisely measures the absolute thickness of gradient index (GRIN) materials up to 50 mm. This advancement is crucial for determining refractive index profiles in inhomogeneous materials.

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    Area of Science:

    • Materials Science
    • Optical Engineering
    • Metrology

    Background:

    • Accurate determination of refractive index profiles in gradient index (GRIN) materials relies on precise knowledge of sample thickness.
    • Existing methods may lack the necessary precision for absolute thickness measurements, particularly for thicker samples.

    Purpose of the Study:

    • To develop and validate instrumentation for measuring the absolute physical thickness of samples with nominally plane-parallel surfaces.
    • To enable accurate refractive index profiling of GRIN materials by providing critical thickness data.

    Main Methods:

    • Development of a novel measurement system designed for absolute thickness determination.
    • Utilized optical path length measurements in conjunction with physical thickness determination.
    • System calibrated and tested for samples up to 50 mm in thickness.

    Main Results:

    • The established system achieves 120 nm (1σ) repeatability in absolute thickness measurements.
    • Submicrometer expanded measurement uncertainty was demonstrated.
    • The method proved effective for GRIN materials and other inhomogeneous, opaque materials.

    Conclusions:

    • The developed instrumentation provides a reliable method for measuring absolute sample thickness.
    • This capability is essential for accurate optical characterization of gradient index materials.
    • The technique has broader applications for metrology of inhomogeneous and opaque samples.