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Low-current operations in 4F(2)-compatible Ta2O5-based complementary resistive switches.

Thomas Breuer1, Anne Siemon, Eike Linn

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Summary
This summary is machine-generated.

Complementary resistive switches (CRS) using Ta2O5 enable low current operation (<300 μA) for passive crossbar arrays. A novel electroforming method optimizes switching current and enhances device stability for future memory applications.

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Area of Science:

  • Materials Science
  • Electrical Engineering
  • Solid-State Electronics

Background:

  • Complementary resistive switches (CRS) reduce sneak path currents in passive crossbar arrays.
  • High operation current in CRS devices hinders their practical implementation.
  • Vertical integration offers a path towards denser memory arrays.

Purpose of the Study:

  • To demonstrate low current operation (<300 μA) in vertically stacked, 4F(2)-compatible Ta2O5-based CRS devices.
  • To introduce and validate a novel three-step electroforming procedure for two-terminal vertical CRS.
  • To investigate the impact of bottom cell (BC) size on CRS performance and endurance.

Main Methods:

  • Fabrication of vertically stacked Ta2O5-based CRS devices with nano- and micrometer-scale bottom cells.
  • Development and application of a novel three-step electroforming procedure for two-terminal vertical CRS.
  • Characterization of device performance, including operation current, switching behavior, and endurance.

Main Results:

  • Achieved low current operation (<300 μA) in Ta2O5-based CRS devices.
  • The novel three-step electroforming procedure successfully adjusted the maximum switching current for nano-BC CRS.
  • Nano-BC CRS demonstrated stable switching up to 10^4 cycles, while micro-BC CRS endured up to 10^6 cycles.

Conclusions:

  • Vertically stacked Ta2O5 CRS devices are viable for low current applications.
  • The proposed electroforming technique enables precise control over switching current compliance.
  • The developed CRS devices show promising stability and endurance for memory applications.