[Comparative Experiment and Spectrometric Analysis on Characteristics of Enclosed Inductively Coupled Plasma]

In the present paper, the spectrum analytic method was used to comparatively study the ICP electron density distribution through two typical ICP sources (spiral-type and planar-type) in closed quartz chamber. The E-H mode transition of inductively coupled plasma and power coupling efficiency were researched through the change in the relative intensity of argon ion spectral line (476. 45 nm). Electron density distribution on the antennas-vertical plane of different ICP source was calculated through non-hydrogen-like Stark broadening of spectral line method. The test results show that the ICP electronic density distribution in H-mode discharge is significantly impacted by skin current of alternating magnetic field. The skin depth decreases with the increase in discharge power. Meanwhile, the bulk of the main plasma narrows and electron density increases. On the vertical plane of the antenna, electron density distribution presents center-symmetry by spiral-ICP source and bimodal by planar-ICP source. The power coupling efficiency is directly affected bysource antenna shape and capacitive coupling effect. The relative intensity of the argon spectrum shows that the power coupling efficiency of spiral-type source is lower than that of planar-type source. The proposed experimental method provides a way to obtain a plasma source in closed quartz cube chamber with the highest electron density ranging from 1. 4X 10(17) to 2. 5 X 10(17) m-3 (spiral-ICP source) and 1. 8 X 10(17) to 3. 0 X 10(17) m-3 (planar-ICP source).