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Updated: Apr 1, 2026

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
X-ray microtomography using correlation of near-field speckles for material characterization
Irene Zanette1, Marie-Christine Zdora2, Tunhe Zhou3
1Physik-Department and Institut für Medizintechnik, Technische Universität München, 85748 Garching, Germany; Diamond Light Source, Didcot OX11 0DE, United Kingdom; irene.zanette@diamond.ac.uk.
Abstract:
Nondestructive microscale investigation of objects is an invaluable tool in life and materials sciences. Currently, such investigation is mainly performed with X-ray laboratory systems, which are based on absorption-contrast imaging and cannot access the information carried by the phase of the X-ray waves. The phase signal is, nevertheless, of great value in X-ray imaging as it is complementary to the absorption information and in general more sensitive to visualize features with small density differences. Synchrotron facilities, which deliver a beam of high brilliance and high coherence, provide the ideal condition to develop such advanced phase-sensitive methods, but their access is limited. Here we show how a small modification of a laboratory setup yields simultaneously quantitative and 3D absorption and phase images of the object. This single-shot method is based on correlation of X-ray near-field speckles and represents a significant broadening of the capabilities of laboratory-based X-ray tomography.
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